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A consortium of companies including Intel, Motorola, and AMD began studying EUV as the next step in lithography in the 1990s. ASML joined in 1999, and as a leading maker of lithography technology, sought to develop the first EUV machines. Extreme ultraviolet lithography, or EUV for short, allows a much shorter wavelength of light (13.5 nanometers) to be used, compared with deep ultraviolet, the previous lithographic method (193 nanometers).
But it has taken decades to iron out the engineering challenges. Generating EUV light is itself a big problem. ASML’s method involves directing high-power lasers at droplets of tin 50,000 times per second to generate high-intensity light. Lenses absorb EUV frequencies, so the system uses incredibly precise mirrors coated with special materials instead. Inside ASML’s machine, EUV light bounces off several mirrors before passing through the reticle, which moves with nanoscale precision to align the layers on the silicon. //
ASML’s new machine introduces an additional trick to produce smaller features on a chip: a larger numerical aperture, which increases the resolution of imaging by allowing light to travel through the optics at different angles. This requires significantly larger mirrors and new software and hardware to precisely control the components. ASML’s current generation of EUV machines can create chips with a resolution of 13 nanometers. The next generation will use High-NA to craft features 8 nanometers in size. //
Demand for faster chips is hardly likely to go down. Mark Lundstrom, a professor at Purdue who began working in the chip industry in the 1970s, wrote an article for Science magazine in 2003 that predicted Moore’s law would run into physical limits within a decade. “In my career, multiple times we thought ‘OK, this is the end,’” he says. “But there's no danger at all that things will slow down in 10 years. We'll just have to do it differently.”
Lundstrom remembers visiting his first microchip conference in 1975. “There was this fellow named Gordon Moore giving a talk,” he recalls. “He was well known within the technical community, but nobody else knew him.”
“And I remember the talk that he gave,” Lundstrom adds. “He said, ‘We will soon be able to place 10,000 transistors on a chip.’ And he added, 'What could anyone possibly do with 10,000 transistors on a chip?’”